Unipulse UTMIII Torque Sensor Solution

Global demand for semiconductors—especially in the automotive and AI industries—is expected to continue growing rapidly. To support this demand, the UTMIII torque sensor, the latest generation in the UTM series from Unipulse, has been adopted by numerous semiconductor manufacturing plants and testing facilities. 

During silicon wafer processing and inspection, XY positioning stages use ball screws to achieve micron-level positioning accuracy and high-speed movement. However, in equipment such as thin-film deposition systems and wafer grinding machines, the accumulation of iron dust or processing debris can increase the load applied to the drive mechanism and reduce machine accuracy. 

By monitoring the drive motor torque with the UTMIII sensor, manufacturers can predict maintenance timing in advance by identifying gradual torque increases. This enables planned preventive maintenance and helps minimize unexpected machine downtime. 

The UTMIII series is ideal for applications that require highly accurate torque measurement. With a minimum measurement range starting from just 0.05 Nm, the sensor can detect and evaluate extremely small torque variations.

The sensor also supports signal response bandwidths up to 5 kHz, offering excellent repeatability and stability for fast and precise monitoring of subtle torque fluctuations. In addition, the UTMIII is resistant to radial and axial loads and remains highly stable even during high-speed rotation. Its compact design also makes integration into mechanical equipment easier and more flexible. 

Applications

The UTMIII torque sensor can be used in a variety of semiconductor production processes, including: 

• Grinding wheel clogging detection: Monitor torque during wafer grinding to detect grinding wheel clogging early and determine the optimal timing for wheel dressing and maintenance. 
• Wafer dicing processes: Control torque during wafer dicing operations to help prevent defects, reduce blade damage, and minimize wafer chipping. 
• Equipment assembly: Measure and manage screw tightening torque during assembly processes to ensure consistent fastening force and prevent failures caused by over-tightening or insufficient torque. 

Other Unipulse Sensors for Semiconductor Factories

In addition to the UTMIII series, Temas also supplies a wide range of Unipulse sensors, including displacement sensors, load cells, and dedicated torque measurement systems for semiconductor machining, inspection, and packaging processes.  

We also offer demo equipment for customers to evaluate before making an investment decision, along with in-depth technical consultation tailored to each specific application. Contact Temas to find the right force and torque sensing solution for your semiconductor manufacturing process. 

As an authorized distributor of Unipulse products in Vietnam, Temas not only provides high-quality force and torque sensors, but also works closely with customers to recommend and implement the most suitable solution for each real-world application. 

With a team of experienced engineers specializing in automation and measurement technology, Temas is ready to support every stage of your project—from requirement analysis and product testing to system optimization and implementation. 

Contact Temas today for detailed consultation and hands-on demonstrations of Unipulse force and torque measurement solutions for your factory.