Technical Information

Fluid Air
Operating pressure range (MPa) Standard 0 to 0,7
High flow type  0 to 0,3

Vacuum specification
(MPa)
  1(P) port 3(R) port
Standard –100 kPa to 0,6 –100 kPa to 0
High flow type  –100 kPa to 0,2 –100 kPa to 0
Ambient and fluid temperature (°C)  –10 to 50 (No freezing) 
Response speed (ms) Note 1)  10 ms or less 
Max. operating frequency (Hz)  20
Lubrication Not required 
Mounting orientation  Unrestricted
Impact/Vibration resistance (m/s2) Note 2)  150/30